KTU B.Tech S6 Lecture Notes VLSI

KTU B.Tech S6 Lecture Notes  VLSI

MODULE I

• Material Preparation- Purification, Crystal growth (CZ and FZ process), wafer preparation

• Thermal Oxidation- Growth mechanisms, Dry and Wet oxidation

• Deal Grove model.

• Diffusion- Fick‘s Laws, Diffusion with constant surface concentration and from a constant source, diffusion techniques.

• Ion implantation-Technique, Range Theory, annealing.

MODULE II

• Epitaxy : Vapour phase epitaxy and molecular beam epitaxy

• Lithography- Photo lithographic sequence, Electron Beam Lithography, Etching and metal deposition

• Methods of isolation Circuit component fabrication: transistor, diodes, resistors, capacitors, N-well CMOS IC Fabrication Sequence